Research On Key Technologies Of NV Magnetometer Excitation And Detection Integration Micro-nano Integration

Nitrogen vacancy（NV）color center is the inherent luminous point defect of diamond.It can be used to make magnetometers.Compared with other types of magnetometers,NV magnetometers have the advantages of high sensitivity,easy integration and strong work adaptability.,So it is becoming a research hotspot.Compared with other types of magnetometers,NV magnetometers can achieve high spatial resolution and high sensitivity for weak magnetic field detection at room temperature.Because at room temperature,the spin of the NV color center can be driven by a microwave field,which allows the spin of the NV color center to be initialized and read.However,the spin state of the NV color center is not easy to control.It is easily affected by the surrounding environment and is coupled with the environment.This further leads to the disappearance of the NV color center coherence and ultimately increases the manipulation of the NV color center.Difficulty.Because the spin state of the NV color center is difficult to control,this requires a microwave field with a more uniform radiation performance to be controlled in the experiment.Aiming at the problems of the difficulty of controlling the NV color center spin in the NV magnetometer and the low uniformity of antenna radiation,this paper has carried out the research work on the key technologies of the excitation and detection integrated micro-nano integration of the NV magnetometer.The research work is as follows:First,introduce the research background of NV magnetometer micro-nano integration,analyze the research status of NV magnetometer micro-nano manufacturing,and specifically analyze the existing micro-nano integrated NV magnetometer and its advanced technology.The integrated manufacturing principle of the ensemble NV magnetometer was elaborated,and the role of the microwave antenna in the NV magnetometer as a device for converting electromagnetic wave energy was further understood.Second,research on the design of NV magnetometer sensor,design an integrated structure of diamond microwave antenna.The volume of this new integrated structure of excitation and detection is less than 30mm³,which not only fixes the microwave radiation antenna and diamond,And the number of photons collected during the experiment was increased by approximately 11.33 times,and the sensitivity of the NV magnetometer was increased by 4.79 timesThird,the principles of the fluorescence waveguide excitation and collection（FWEC）structure and the diamond microwave antenna integration（DMAI）structure are deduced and compared,and an experimental platform is built independently.The above determines the best parameters for excitation detection.Under the best experimental parameters,the focus is on the excitation efficiency,collection efficiency,magnetic detection ability and noise spectral density of the integrated diamond microwave antenna structure.The magnetic measurement sensitivity of the integrated excitation and detection structure has reached 9.74nT/（HZ）^1/2.