Research On A New Type Structure Multi-degree-of-freedom Ultrasonic Motor

Piezoelectric ultrasonic motor is a new type of motion driver.It has the characteristics of flexible structure,changeable form,light weight,self-locking when power is off,fast response speed,high control accuracy,and is not sensitive to interference from electric and magnetic fields.It has broad application prospect.In the engineering field,ultrasonic motors using single vibration mode and simple resonance mode have become mature,but there are few researches on ultrasonic motors using multi-dimensional vibration mode.Aiming at the design of the ultrasonic motor of multiple degree-of-freedom(DOF),study proposes a new ultrasonic motor of the multiple DOF,and carries out theoretical analysis and experimental research.The main research contents are as follows:1.Vibration modes are analyzed for the newly designed ultrasonic motor and the working principles are discussed.In-depth research and detailed analysis of the formation principle of the particle traveling wave on the top end of the stator and the influence factors of the elliptical trajectory of the surface particle are analyzed.2.After preliminary structural design for the ultrasonic motor designed in this study,the voltage excitation method for the designed ultrasonic motor is proposed,and the finite element analysis software ANSYS APDL is used to model and analyze the stator components.3.Using the ANSYS APDL,works including the parameterized modeling and modal identification and judgment of the stator of the designed ultrasonic motor are carried out,and the sensitivity of each structural parameter to the structural vibration modal frequency is obtained.The optimization of the structural parameters of the designed ultrasonic motor is made based on these analyses.4.According to the optimization results,prototype preparation,experiment and analysis are carried out to verify the rationality of the design method.