Design Of The On-line Disc Testing Interferometer Based On Twyman-green Type

The interferometer has become an indispensable testing equipment in production due to its advantages of high detection accuracy and fast speed.For some lens with low accuracy and high demand,Optical workshop often use the high-polishing technology of the whole disk processing.Presetting the polishing time and speed.After processing,removing the lens on the plate and sending it for inspection in time.But it is overly dependent on the precision of the machine and human experience,and the precision of the lens processing and the scope of application are limited.In order to meet the needs of large-scale production in factories,interferometers with small size,light weight and less affected by the environment are urgently needed.Based on the Twyman-Green interferometer in this laboratory,this paper proposes a design scheme that uses a plane reference mirror to replace the original model,which can save the process of adjusting the model,so that it just needs to adjust the test lens.According to the principle and requirements of this system,relying on ZEMAX and the three-dimensional mechanical design platform,we have completed the optomechanical design of a Galileo beam expander with a 50 X times,a high-precision spherical standard lens which Measuring aperture is Φ50 mm,a convergence system,a collimation system and the imaging system,these optical system meets the aberration requirements of the detection system,and the design of the beam splitter prism device and the main box at the same time.At the same time,we have preliminary completed the design of the dichroic prism device and the main box.These will lay the foundation for the development of an engineering prototype for rapid non-destructive inspection of the optical profile.