Develop Of Spherical Surface Online Detector Based On Twyman-Green Interference

As the core of the optical instruments, optical system’s performance is determined by the quality of the optical components. Spherical optical lens is the most commonly used optical components, and its surface shape detection is one of the most important aspects of lens production. The most commonly used methods of surface shape detection are test plate method and interferometer method. Test plate method belongs to contact-type detection, is easy to cause secondary damage of the surface shape. Interferometer method belongs to non-contact, but it usually detects single-chip and costly. Both of these methods have shortcomings, which limit the increase in productivity.By the comparison of two methods and combining with the characteristics of optics lens production, designed a new type of interferometer, which was base on Twyman-Green interference. The interferometer will be used to achieve non-contact online testing of surface shape. Through the simulation of the system by Zemax, found the way of surface shape detection, and then did the simulation of lens detection. According to the needs of the surface shape testing, we selected the structures and parameters, completed the whole machine structure design, as well as related components and regulating mechanism. Then, we accomplished a trial production of prototype and tested the sample lens. The results of sample detection show that the prototype meets the requirements.