Development Of Micro-angular Displacement Platform Based On Piezoelectric Driving

In recent years,with the development of the 5 G communication technology and application,function of high-end biomedical micro-nano devices are related to the research and development and promotion,smart chip industry chain of technological innovation and the progress of the manufacturing process,from all walks of life will focus on the precision demand is higher and higher,the processing difficulty increasing level of micro-nano functional device manufacturing and high-end micro-nano processing and manufacturing.Micro-nano machining technology is a method to meet the demand of micro-nano manufacturing in the new era,and the high-precision micro-nano motion positioning platform is an important cornerstone of micro-nano manufacturing.Micro-nano etching technology is one of the methods to cope with the demand of micronano manufacturing in the new era.The goal of this paper is to manufacture a precision micromotion device that can be applied in micro-nano etching processing experiments.In this paper,a three-axis driven micro-angular displacement movement platform using piezoelectric ceramic device is developed,which is easy to achieve the output of the overall controllable angular movement trajectory of the platform,and can meet the experimental requirements of controllable relative movement of etched particles and the material to be engraved in a limited space under the condition of controlling the cost.lt the main research content of this document is as follows:Firstly,the overall design and 3D modeling of the piezoelectric micro-angular displacement movement platform was completed.The static stress analysis and modal analysis of piezoelectric micro angular displacement platform are carried out es.A piezoelectric micro angular motion platform is built,and the precision of the platform’s workspace and each degree of freedom is measured.Secondly,according to the requirements of etching experiment,the motion model described by inclination direction and inclination Angle is established,and the corresponding motion program is realized.Three motion control functions of the platform are realized,namely,positioning motion,waveform controllable periodic motion and controllable continuous trajectory motion.Finally,the influence of the micro-motion provided by the micro-angular displacement movement platform on the experimental results of micro-nano etching was explored.The research contents include analyzing the influence of micro-angular motion and microdisplacement motion on the experimental results of micro-nano etching.There is also the influence of the periodic motion of different frequencies,amplitudes and waveforms output by the moving platform on the experimental results of micro-nano etching.