Research On Automatic Correction Mechanism Of Optical Element In Sub-micron Precision

Optical lens is widely used in daily production and life.In commercial cameras and steppers,optical lens is an indispensable part.The assembly and calibration is the last step in the manufacture of optical lens,which directly determines its final precision.Currently,for the calibration of sub-micron-precision optical lens,the most often used way is manual tooling calibration.In order to solve the problem existing in manual assembly calibration and realize automatic assembly calibration,an automatic assembly calibration mechanism for submicron precision optical components is designed in this project.The installation and calibration process of the automatic installation and calibration mechanism is divided into two parts: the direct push adjustment and the impact adjustment process.In order to meet the requirements of the high efficiency and accuracy,the adjustment process consists of two steps according to characteristics of the direct push type and the impact type respectively.The initial adjustment of the lens is completed by direct push type with faster speed,and the final adjustment is completed by impact type with higher precision.The main problem to be solved in the direct push adjustment and assembly is that the leap interval and rebound amount of the lens affect the assembly precision.In this project,the friction between the lens and the lens support in the process of installation and alignment is studied,the mechanism of the lens motion during the direct push adjustment is analyzed.With these,we achieved the theoretical model of the lens motion.The experimental mechanism is then designed to verify the theoretical model.According to the theoretical model of lens motion,the process of direct push calibration is improved to avoid the jμmp interval and solve the rebound problem by predicting the rebound amount.The accuracy of the improved direct pushing method is an order of magnitude higher than the original method.Finally,combined with the research of the direct push and impact adjustment process,the overall automatic assembly correction mechanism is designed and its assembly accuracy for the experimental lens is tested.It turns out that the automatic assembly correction mechanism can meet the requirements of the automatic assembly of sub-micron optical components.The main innovation of this project lies in the construction of the theoretical model of the direct push type loading and calibration process,the improvement of the direct push type loading and calibration process,so that the direct push type loading and calibration mechanism can get a higher accuracy.Meanwhile a new type of sub-micron automatic assembly calibration mechanism with high speed and accuracy is designed by simulating the impact process and combining the direct push and manual impact calibration.