Investigation On Error Distribution Mode Of Slow Servo Single Point Diamond Turning Microlens Array

Microlens array is one of the important research directions of micro-optics.It has the advantages of small size,light weight,high integration and excellent optical performance,which makes it show unique optical performance that traditional optical elements do not have,and is widely used in lighting,imaging,communication,sensing and other fields.Therefore,in recent years,many research institutions at home and abroad have invested a lot of money and manpower in the structure design and processing technology of microlens array.Slow knife servo single point diamond turning technology has the characteristics of high consistency of dimensional precision,high controllability of machining precision and machining size up to micron level,making it one of the important methods for machining microlens array.In this thesis,theoretical and experimental methods are used to study the tool path optimization method and the machining error evaluation method of slow tool servo single point diamond turning with high filling rate microlens array.The main research contents are as follows:（1）for different openings in the shape of micro lens array mathematical description method,considering the processing parameters,cutting tool geometry parameter,feeding mode and the discrete method to slow knife knife locus servo turning surface quality and the effect of micro lens array based on spiral feeding way and perspective of arc length discrete methods such as micro lens array tool path generation algorithm,The method of enlarging aperture is proposed to improve the edge overcutting of lens element.（2）For the microlens array with high filling rate,on the basis of expanding aperture method,the method of partition processing is proposed to group and process the lens element with high filling rate in turn.Meanwhile,the influence of expanding aperture height and the backoff height of connecting tool path between partitions on the shape error of the lens element with high filling rate is introduced.A new slow knife servo machining method with submicron shape precision for this type of microlens array is established,and the effectiveness of the optimization method is verified by experiments.（3）At present,the evaluation of the machining quality of microlens array is limited to the surface roughness and shape accuracy of a few lens elements,and there is still no effective algorithm for the position error of array and shape accuracy of a large number of lens elements.Aiming at different mouth shapes（round,square,hexagon）lens array to establish surface roughness,the shape precision and the position error of evaluation methods,and establish the ultra-precision machining micro lens array integrated system,the simulation and error evaluation,not only provides the micro lens array slow knife servo processing cutting tool path generating surface topography simulation,optimization and processing,It also provides machining error evaluation and error distribution pattern diagram for a large number of microlens arrays.（4）Based on the above theoretical and experimental research,slow knife servo turning machining of microlens array with different opening shapes was realized,and the distribution mode of machining errors of microlens array with different opening shapes was established and analyzed.