Research On The Mechanism And Technology Of Rotary Ultrasonic-assisted Electrochemical Discharge Composite Machining

Quartz has excellent properties such as non-magnetic,light material,high hardness,etc.,and has a wide range of application prospects in the fields of semiconductors,optical instruments,and sensors.However,quartz,as a non-conductive hard and brittle material,is not suitable for EDM and ECM machining based on the principle of electrical machining,and the machining efficiency of mechanical milling is low.It is easy to cause tool wear and micro-crack damage on the machined surface.Spark Assisted Chemical Engraving(SACE)is a material removal process based on the comprehensive action of physics and chemistry.It is expected to realize damage-free processing of insulating hard and brittle materials such as quartz.However,this method also has low removal efficiency and processing technology.Instability and other issues.To this end,a new process method for quartz processing-rotating ultrasonic assisted electrochemical electrical discharge composite machining is proposed.In order to effectively combine the three processing methods of high-speed milling,ultrasonic vibration,and SACE,an experimental platform that can carry out composite processing technology is built.Realize the function of adding longitudinal ultrasonic vibration of workpiece and high-speed rotating milling of tool electrode in SACE processing.The research process adopts a step-by-step approach.Firstly,it explores the combined processing technology of high-speed rotation and SACE,and studies the influence of electrode speed,feed rate,voltage and electrolyte concentration on machining accuracy and efficiency,and realizes SACE compound milling with high feed rate of quartz.Processing significantly improves processing efficiency.After that,the ultrasonic vibration and SACE composite processing technology was explored,and the effect of vibration amplitude,immersion depth,and feed rate on the processing technology was studied.The experiment obtained a scanning processing strategy to improve the efficiency and accuracy of ultrasonic vibration and SACE composite processing.Finally,based on the optimal parameters obtained,the three processing methods of high-speed milling,ultrasonic vibration and SACE are combined,and the influence of multi-factor coupling on the processing morphology is studied.Under the immersion depth is 2.5mm,the voltage of 167 V,the electrolyte is 5wt% Na NO3 solution,the parameters of vibration amplitude of 2.5μm,rotation speed of 20000r/min,and feed rate of 0.15mm/s,a micro groove structure with a smooth bottom and a regular shape is obtained.