Study On The Adsorption Performance And Influencing Factors Of Electrostatic Chuck

As an emerging adsorption method,electro-adhesion technology involves multidisciplinary such as electromagnetism,materials science and mechanics.This technology solves the problem of adsorbing porous,fragile and soft materials,and also has a wide range of applications in the stiffness adjustment of soft robots;accordingly,it has become a deep focus for domestic and international researchers in recent years.Based on the electro-adhesion technology,this paper proposes an equivalent model to calculate the electric field intensity of the electrostatic chuck,and the adsorption performance of the electrostatic chuck is simulated and experimentally studied.The main contents of this paper are summarized as follows.Firstly,an equivalent method,namely the electriferous wire model method,for calculating the electric field intensity of the electrostatic chuck is proposed.Based on the function theory of complex variable for solving the electric field intensity of the electrostatic field,aiming at different electrode structures of the electrostatic chucks,the electrode structure of the planar comb tooth is simulated by an equivalent model of electriferous wire with infinite length,and the electrode structure of the spatial single-sided comb tooth is simulated by an equivalent model of multiple electriferous wires coupled;the two equivalent models are verified,and then the electric field intensity,the normal an d tangential electro-adhesion force of the electrostatic chuck were calculated.Secondly,the influence of the different factors on the electric field intensity of the electrostatic chuck is investigated.The distribution of the electric field intensity of the electrostatic chucks with different electrode structures is obtained by the proposed electriferous wire model method,and the influence of the electrode structure on the adsorption performance is then discussed;aiming at the electrode structure of the spatial single-sided comb tooth of the electrostatic chuck,the influence of electrode size,electrode shape and the parameters of insulating dielectric layer on the electric field intensity is analyzed;The 3-D simulation models are established for the crossing electrode of spatial double comb tooth and the spatial checkerboard electrode,and the feasibility of the two spatial electrode structures applying to electrostatic chuck is analyzed.Finally,the production process flow of electrostatic chuck is formulated,and the adsorption performance of the electrostatic chuck is investigated experimentally.The electrostatic chucks with different electrode structures and materials are produced,the adsorption performance of the electrostatic chuck is measured through the constructed test system,and the reasons of the errors between the calculated and the measured results are analyzed.The results show that,the tendence of the calculated and measured results of both the electric field intensity and the adsorption force of the electrostatic chucks with different parameters is consistent;and that the normal adsorption force of the spatial single-sided comb tooth electrode increases by 40.5%when the excitation voltage is 3kV,compared with the ordinary planar comb tooth electrode.