Research On Analysis Technology Of Environmental Micro-Vibration Response In Electronic Industrial Plant

With the continuous development of the field of microelectronics,the production test equipment inside the electronic industrial plant has higher requirements for environmental micro-vibration.Excessive environmental micro-vibration will affect the use of equipment.In order to reduce the impact of environmental micro-vibration on the electronic industrial plant,this paper studies the environmental micro-vibration response of the electronic industrial plant.Two technical methods are used.One is to simulate the micro-vibration response of the electronic industrial plant building structure through finite element simulation software.The other is to locate the environmental micro-vibration source and grasp the location information of the vibration source for subsequent anti-vibration design.The main research contents of this paper are as follows:The analysis and evaluation method of the environmental micro-vibration response of the electronic industrial plant is studied.We conduct on-site vibration tests on the electronic industrial plant to obtain the actual measured vibration acceleration data.The generalized low-frequency attenuation integral algorithm and the octave frequency domain algorithm based on segmented spectrum refinement are used to obtain the vibration velocity amplitude spectrum and one-third octave amplitude spectrum.We make an accurate analysis and evaluation of the vibration of the electronic industrial plant.The simulation analysis method of lattice beam structure vibration response is studied.The ABAQUS finite element numerical simulation software is used to establish the lattice beam structure model of the plant.We use the measured acceleration time history data of the plant foundation as an excitation to analyze the dynamic time history of the model.The simulation results are compared with the measured results to prove that the finite element simulation can simulate the vibration response of the electronic industrial plant structure more accurately.The location algorithm of the micro-vibration source in the electronic industrial plant environment is researched.We use wavelet threshold denoising to preprocess the measured acceleration time history signal.The PHAT weighting generalized crosscorrelation method is selected for time delay estimation,and the method is verified through experiments to improve the accuracy of time delay estimation effectively.Aiming at the problem that the positioning coordinate matrix is ill-conditioned and thus affects the positioning result,a vibration source positioning optimization method based on reconstructed regularization matrix is proposed.We use finite element simulation to simulate vibration source positioning experiments,and carry out multiple vibration source positioning experiments on the actual site.Comparing the positioning result error between the classic positioning algorithm and the method in this paper proves that the vibration source positioning method in this paper can improve positioning accuracy effectively.