Dynamic Modeling And Analysis Of A Five-degree-of-freedom Hybrid Polishing Robot With Gaps

With the rapid development of aerospace,modern optical systems,semiconductor processing,and other industries,as well as the continuous improvement of related computer control technology and numerical control processing technology,the requirements for super smooth surface component processing are increasingly high.Electrical-assisted photocatalyst nanoparticle collagen radiation polishing is a processing method that can remove super smooth surfaces of ananoid grade.The combination of current polishing technology and ultra-precision motion platforms can well complete the complex curved surface super-precision polishing processing.In this combination,the mixed machine bed is the first choice in the field of ultra-precision motion platforms due to its wide working space,excellent dynamic performance,and high load capacity.At present,the joint agency is developing in the direction of high-speed,lightweight,and high-precision.However,if the end of the body has high loads,the inherent characteristics of the movement of the organ itself will cause its organ to develop a certain elastic deformation,and the impact collisions that may occur in the movement’s side gaps will affect the dynamic characteristics of the joined body.Therefore,the dynamic analysis of spatial mixed-connection agencies while considering the flexibility of the components and the motion-side gap is of great significance.This paper is based on the 3-RPS combined robot as the study object,combined with the XY direction of the combined cross-skating system to form the XY-3-RPS hybrid system as the carrier of the ultra-precision processing movement platform,comprehensive analysis of the elastic deformation and motion side gap caused by the series combined sub-system and the combination sub-systems,and specific research work as follows:First,athletic modeling of the XY-3-RPS hybrid polishing robot was carried out,and athletic simulations were conducted by assembling virtual samples,which were compared with the results of numerical analysis to verify the correct rationality of the hybrid robot model.Analyze the body and establish a sporting model that contains its motion and side spaces.Considering the movements and changes that may occur in the system under the actual working conditions,the XY-3-RPS hybrid polishing robot system will be divided into joint subsystems and serial subsistems,and the hybrid subsystem will be further split into a dynamic sub-system,a drive arm system,a dynamic arm system,and a serialized sub-system,combining the principles of motorology and virtuosity to establish a rigid dynamic model of the various subsystems.Then,through vector combination,the rigid dynamic model of the entire hybrid system is obtained,and the theoretical model and the virtual sample are used to complete the dynamic analysis of the hybrid systems.Then,the XY-3-RPS hybridization of the sub-systems divided by the polishing robot uses the Newton-Euler equations,Lagrange equations,and the theory of limitants to complete the construction of the dynamic models of each sub-system.On the basis of the dynamic model of the sports compulsory equations and dynamic platform subsystems,the elastic dynamic models of the sub-chain systems are merged together to establish the hybrid system’s elastic dynamic model.Through model and simulation validation analysis,the influence factor of elastic deformation on the dynamic characteristics of hybrid robots was explored.Finally,based on the principles of numerical statistics and random functions,the establishment of the gap model of various movements in the hybrid polishing robot system is completed so as to obtain the virtual bar length of each branch chain.Furthermore,the desired virtual wafer length and the contact force of the various movements sideways when containing the motion sideways will be merged into the elastic dynamic model of the hybrid system,and the XY-3-RPS hybrid robot with the movement sideways dynamics will be obtained.After numerical analysis,the dynamic characteristics of the mixed system will be explored.Compare the results of the elastic deformation of the branch chain with the clearance between the moving pair and each subsystem,and comprehensively compare and explore the coupling relationship between the elastic deformation of each branch chain and the clearance between the moving pair,as well as their joint effects on the dynamic characteristics of the hybrid system,respectively.Analyze the key factors that affect the error changes of the end output of the entire hybrid system,and provide accurate control for the XY-3-RPS hybrid polishing robot in the future Providing theoretical basis and guidance for error compensation.