Study On Gxbpj-70 Sway Downward Polishing Machine Based On Virtual Prototype Technology

As one of the hallmarks of the development of manufacturing, ultra-precision polishing has been applied in broad areas, such as aviation, spaceflight, military affairs, Integrate circuit, civilian equipment and so on. The components which are manufactured by optical materials are playing an important role in manufacturing with the development of optoelectronic technique and the demand for these components has kept rising. Such component requires not only high accuracy and extremely low surface roughness but also non-sub-surface damage. However, the level of domestic development of the technology is still at a low stage. We do not have a deeper understanding of the principle of polishing and polishing process is depended on experiences too much which lead to the low productivity. Therefore, it is very necessary to study mechanism and develop polishing machines which have good stability and high accuracy.This paper introduced some basic principles of virtual manufacturing. It introduced working principle, transmission principle and questions to be improved of polishing machine by applying virtual prototyping technology into the research and development of sway downward polishing machine. The paper set up a mathematical model of polishing process and analyzed the stress distribution of polishing. The relationship between machine working parameters and CMP polishing material removal rate was given. The digital solid modeler, virtual assembly, interference check and motion simulation of sway downward polishing machine were finished and the strength, stiffness and stability of parts of the machine were analyzed. The inner information in polishing process which can not get from laboratory was obtained, and the foundation of follow-up simulation analysis was laid by doing that. The paper analyzed the dynamic characteristics of the equipment by ANSYS, and pridicted the mechanical strength characteristics of the equipment which provided a theoretical basis for the design. The defects in virtual design and manufacturing were found and the equipment could be optimized by improving the structure.In short, the research which applies virtual prototyping technology into sway downward polishing machine is feasible, and it provides some references, methods and experiences for the further research and development of sway downward polishing machine.