With the gradual development of manufacturing industry in the direction of high precision,more and more large size and complex structure parts appear in the fields of aerospace,precision machining,automotive manufacturing,etc.How to complete the measurement of multi-dimensional and multi-point vibration of such complex parts is an urgent problem to be solved.Combining the flexibility of collaborative robot posture adjustment with the advantages of accurate laser interference measurement,the study of non-contact,high-precision,multi-dimensional multi-point vibration measurement system will have important application value.For this purpose,this paper develops a vibration interferometry system based on a collaborative robot and conducts an application study.The main work of the paper is as follows.(1)Design and build a vibration interferometric measurement system based on a collaborative robot,complete the overall design,hardware model and software design of the built vibration measurement system,and analyze the impact of system noise on vibration measurement accuracy.The filtering method can effectively filter out the system noise.(2)The calibration of the coordinate system parameters of the vibration measurement system is completed,and the conversion matrix between the workpiece coordinate system and the tool coordinate system and the base coordinate is obtained,and then the collaborative robot motion is controlled to complete the positioning of the laser interferometer,and the positioning error of the laser interferometer is analyzed and corrected by using the optical calibration plate,and the corrected positioning error is controlled within 1mm.(3)The implementation method and feasibility of the automatic beam adjustment algorithm are studied.Combining the basic principles and applicable conditions of hill climbing search algorithm and variable neighborhood search algorithm,the beam auto-tuning algorithm applicable to vibration measurement system is designed to realize the adjustment of the incident light angle of laser interferometer,and the feasibility of the beam auto-tuning algorithm is verified on the surface and plane.(4)The application of the vibration interferometry system based on collaborative robot in multi-point and multi-dimensional vibration measurement is studied.The measurement of single-point and multi-point vibration signals of plane mirrors is completed by using the collaborative robot-based vibration interferometry system,and the addition of the collaborative robot improves the efficiency of multi-point vibration measurement;the measurement of multidimensional vibration signals of ultrasonic elliptical vibration tools is completed by using the vibration measurement system,and the tool resonance frequency and elliptical trajectory are analyzed to provide a reference basis for tool design optimization. |