Design And Experimental Study Of Inertial Piezoelectric Diaphragm Pump

As a kind of high precision fluid conveying device,piezoelectric pump has the advantages of simple junction,easy processing,low energy consumption,high precision,high reliability,and has a wide application prospect in the field of fluid conveying.Piezoelectricity pump can accurately control its output flow and output pressure through external driving voltage and driving frequency,which is widely used in medical equipment,biochemistry,fuel cell and other scientific research and life fields.The traditional piezoelectric pump has small volume variation and low output performance,but the piezoelectric diaphragm pump made of resonance principle can effectively improve the output performance of the pump because of the large diaphragm shape variable.In this paper,an inertial piezoelectric driven diaphragm pump(hereinafter referred to as the "piezoelectric diaphragm pump")is designed.The circular piezoelectric oscillator is used as the driving force source,and the vibration excitation is transmitted to the diaphragm plate by the system resonance principle.The deformation of the diaphragm causes changes in the volume of the cavity,so as to realize the one-way flow of fluid.The main research contents of this paper are as follows:1.This paper introduces the research background and significance,and expounds the research status of piezoelectric pump at home and abroad.2.The material characteristics,structure design and support mode of piezoelectric vibrator are analyzed.The force model of piezoelectric vibrator is established and the factors affecting deformation are analyzed from statics and dynamics.The modal of piezoelectric vibrator is calculated by finite element simulation,and the rationality of theoretical analysis is verified by experiments.3.Use simulation software to conduct modal simulation analysis on the adjusting mechanism,establish vibration mechanical model of the adjusting mechanism,and solve the dynamic response of the vibration system.The structure of piezoelectric diaphragm pump cavity is designed and analyzed.The piezoelectric vibrator and diaphragm plate are calculated and analyzed according to the theory of small deflection of axisymmetric thin circular plate and plate shell correlation.4.The overall design and analysis of piezoelectric diaphragm pump.By modal simulation to calculate the piezoelectric diaphragm pump during the first four order modal vibration mode accords with the actual requirements of working mode,the system of the whole equivalent for the three degree of freedom forced vibration model,the differential equation and through the free vibration attenuation method to determine the viscous damping of the system,and the use of MATLAB simulation software to analyze the resonance frequency of the system,The nonlinear dynamics analysis of the single system and the whole system of piezoelectric diaphragm pump is carried out.5.On the basis of theoretical analysis and simulation analysis,the experimental prototype of piezoelectric diaphragm pump was made and tested.The influence of cavity height,spring plate,mass block,driving frequency and driving voltage on pump output flow was studied and the optimal parameter value was determined.