| The precision gas flow control solenoid valve is an advanced mass flow meter that can measure and control the mass flow of various gases,including inert,corrosive,and toxic gases.The valve has the advantages of fast response and highspeed stability,and can achieve stable control of flow setpoints in a very short time.The valve is widely used in various fields,including semiconductor manufacturing,medical equipment,life sciences,environmental protection,energy,and research laboratories.This article focuses on the optimization design analysis of the overall structure of the valve body,including:(1)A design scheme for the overall structure of the solenoid valve is proposed,and the geometric structure and working principle of the solenoid valve are explained.Based on the ideal gas Euler motion equation of one-dimensional adiabatic flow,the equation for calculating the equivalent mass flow rate of gas flowing through the orifice of the solenoid valve is derived,and the design of the key parameters of the solenoid valve is completed.From the results of static simulation,the key parameters are: spring preload force of 1N,disc spring stiffness of 100N/mm,and coil turns of3000.(2)Finite element simulation software is used to analyze the different forcedisplacement results of the disc spring under rigid and non-rigid contact,and the state of the disc spring module under different modal orders is analyzed.The results prove that the overall stability of the system is good,and its ability to resist external excitation interference is strong.The electromagnetic force and current size,as well as the air gap size,are verified using the electromagnetic finite element simulation method,and the results obtained from the simulation are consistent with the theoretical calculation results,with the current and electromagnetic force having a quadratic relationship.(3)The influence of valve core displacement on the flow field performance of the solenoid valve is analyzed,and the valve core structural parameters of the solenoid valve are optimized.The design theory of the precision gas flow control valve is verified by combining the finite element simulation method.The influence of valve core displacement on the pressure,velocity,and vortex characteristics of the flow field at the orifice of the solenoid valve is analyzed.In order to improve the working performance of the solenoid valve and improve the flow control accuracy,the influence of various structural parameters such as valve seat and valve core cone angle on the flow field performance of the solenoid valve is comprehensively analyzed.The combination of oblique slot gap and conical damping orifice is used,and the overall slope of the flow curve is reduced,and the control effect is the best.(4)MATLAB Simulink is used for dynamic simulation of the solenoid valve,and the influence of various structural parameters on the main dynamic performance indicators is studied.The dynamic flow step response and frequency response characteristics of the valve are simulated and studied.Finally,the dynamic and static simulation results under different parameter combinations are analyzed and processed,and the optimal parameter combination with the best comprehensive performance is obtained using the orthogonal experiment method,which is a spring stiffness of70N/mm and a gap of 0.25 mm. |
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