Research On Microgear Motor System Based On Electromagnetic Drive

As a driving component of micro-electromechanical systems,micro-motors have always been a key technology and a hot research field in the micro-electromechanical system.The development of micro-motors reflects a country’s research level in microelectromechanical systems.Due to the characteristics of high driving power and good biocompatibility of electromagnetic-driven micro-motors,it has broad application prospects in targeted drug therapy and joint driving of micro-robots.In this paper,an 80μm-sized electromagnetic-driven micro-gear motor system is proposed and its processing and assembly technology is studied.Additionally,a vision-based method for measuring the rotational speed of the micro-motor is presented.The main research content is as follows:For the proposed electromagnetic-driven micro-gear motor system,the magnetic field distribution model of a single-turn electromagnetic coil is established using the Biot-Savart law,and the theoretical model of the magnetic field distribution of a multi-turn electromagnetic coil is derived.The external driven electromagnetic coil is optimized based on the theoretical model.The mathematical model of the output torque of the micro-gear motor system is established using motor theory.Finite element simulation of the magnetic field driving model of the micro-motor system is performed using COMSOL software to verify the correctness of the theoretical model.The processing technology of the parts of the micro-motor system is explored,and a mathematical model of the micro-electrolysis machining system is established using a second-order differential circuit-based micro electrolysis machining method.The process parameters are optimized using a multi-objective particle swarm algorithm based on the established model.The experimental parameters before and after optimization are compared,and the results show that the optimized processing parameters improve the accuracy of micro-fine electrolysis machining.To reduce the influence of electrode impurities on machining accuracy,the processing path is optimized,and high-precision parts of the microgear motor system are successfully machined.Assembly process experiments of the machined micro-components are carried out,and the micro-gear motor system is successfully assembled using instruments such as electromagnetic probes,piezoelectric micro-motion platforms,and optical microscopes to verify the possibility of assembly.Additionally,a machine vision-based micro-gear rotor speed measurement method is proposed,and calculations such as filtering,binarization,morphology,and edge extraction in micro-electric image processing are analyzed.The rotational speed measurement experiment and error analysis are performed,and the systematic error of the measuring device is corrected based on the error analysis results.The results show that the machine vision measurement method has an average relative error of about 1.62%,indicating that the method can achieve high accuracy in measuring the rotational speed of the gear.