| In recent years,with the escalation of Sino US economic frictions and the outbreak of COVID-19,China’s domestic and international development environment is becoming increasingly complex,and the industrial chain and supply chain security are facing a threat.In order to comply with the current economic development environment,in March 2021,the National People’s Congress deliberated and adopted the outline of the 14 th five year plan,which proposed to "accelerate the construction of manufacturing power and quality power,and build a modern industrial system with the coordinated development of real economy,scientific and technological innovation,modern finance and human resources".As an important pillar of modern manufacturing industry-China’s semiconductor equipment industry,whether the enterprises in this industry can develop with high quality affects the development quality of China’s manufacturing industry and the safety of supply chain.As a latecomer,if Chinese semiconductor equipment enterprises only rely on the introduction imitation path,they can only be limited to the existing technological paradigm,which is difficult to achieve technological innovation and catch up with developed countries.In recent years,in order to solve the disadvantage of latecomers,domestic semiconductor equipment enterprises began to make up for the deficiencies in R & D and manufacturing and realize the progress of technology and business model through a new innovation model,namely "collaborative innovation".This paper selects NAURA,a leading domestic semiconductor equipment enterprise,as a typical case to explore the path of collaborative innovation of Chinese semiconductor equipment enterprises.Based on the research res ults of the current innovation mode and path of semiconductor equipment enterprises,combined with the first-hand data obtained from investigation and interview and the second-hand data obtained from collection and sorting,this paper analyzes the collabor ative innovation path of NAURA through grounded theory.The results show that: firstly,NAURA has experienced three development stages,realizing the innovative development from regional integrated circuit equipment suppliers to domestic semiconductor high-end process equipment supply platform,in which collaborative innovation plays an important role;Secondly,environmental synergy and subject synergy are the main ways for NAURA to carry out collaborative innovation.On the one hand,enterprises obtain th e elements of innovation system such as capital,land,technology and labor force through collaboration with the innovation environment;On the other hand,by cooperating with the participants,enterprises improve the value chain links such as enterprise t echnology R & D,product design,manufacturing,marketing,distribution and service,so as to serve innovation activities.Finally,NAURA enterprises build a value network through value creation and value sharing,achieve collaborative innovation and estab lish the core competitive advantage of the enterprise.Through the case of NAURA,it shows that domestic semiconductor equipment enterprises can adopt the collaborative innovation mode to achieve technological progress and narrow the gap with foreign advanced enterprises. |