Research On The Management Method Of Thin Film Equipment In Semiconductor Chip Production

With the rapid development of LSI circuits,China’s semiconductor chip manufacturing technology has made considerable progress.In the process of chip production,equipment is indispensable,and its management status is directly related to the company’s capacity and product yield.Therefore,how to improve the management level and capacity of equipment,reduce the trouble rate,improve the yield of product have become the research subject of semiconductor chip manufacturing enterprises.This paper is mainly based on the management method of thin film equipment in chip production.the Existing problems and improve countermeasures are discussed based on the introduction of thin film equipment,the main contents and methods of the management of thin film equipment are analyzed from the four contents as equipment maintenance、 troubleshooting,、spare parts management and manpower management.This paper is composed of five parts.The main contents are shown as below:The first chapter: introduction.It mainly includes the background,purpose and significance of the research,the research status at china and abroad,the thinking and method of research.The second chapter: the introduction of thin film equipment in semiconductor chip manufacturing.On the basis of the basic concept of thin film equipment and the analysis of its types,process and parameters,the equipment of atmospheric pressure CVD,low pressure CVD,plasma CVD,metal CVD and so on are introduced.The third chapter: the analysis of the management content of the thin film equipment.the main contents and methods of thin film equipment management are analyzed from the equipment maintenance,troubleshooting,spare parts management and manpower management.The fourth chapter: improvement and perfection of the management method of thin film equipment.That is: improving the quality of equipment maintenance,improving skill of equipment troubleshooting,optimizing the balance of spare parts inventory management,and establishing the incentive system for equipment management talents.The fifth chapter: the conclusion.