Research On The Design And Performance Of A Flexible Dual-axis Micro-gripper Driving By Single Piezoelectric

Precision manufacturing,integrated circuit packaging,semiconductor processing,and other fields benefit greatly from the development of micro-nanotechnology,micro-assembly technology,and micro-operation technology,which assembles many micro and fine parts into more complex Micro-electromechanical systems(MEMS).These fields also benefit greatly from these technologies’ high research value and broad scientific applications.The functionality of the micro-gripper,which serves as the micro-operating system’s last effector,is essential to the system’s effective completion.Actuators of various kinds have been created.Piezoelectric actuators(PZT),which are consistent with the path of micro-operation development,have a number of advantages among them,including high control accuracy and quick response times.The fundamental issue with current piezo-driven micro-grippers is that they can only conduct a straightforward clamp-hold-release operation since they only have one degree of freedom under a single piezoelectric drive.On the other hand,as micro-operation technology advances,there is a growing need for the range of motion that micro-gripper can provide.This work designs a single flexible dual-axis micro-gripper that can be driven by a single piezoelectric ceramic.It can execute dual-axis operations in order to suit the operational needs of these applications.The following is how the performance analysis of the micro-gripper is carried out in terms of structural design,theoretical modeling,finite element simulation,and experimental testing:Firstly,the structural design of the body of the micro-gripper is proposed.A dual-axis microgripper that can perform clamping and rotational operations is designed to be driven by a single piezoelectric ceramic driver.Based on this,the kinematics,statics and dynamics of the microgripper are theoretically analysed and its displacement amplification ratio,input stiffness and natural frequency are determined based on the pseudo-rigid body modelling method.Based on the moment balance principle to analyse the clamping force of the micro-gripper,the dimensional parameters of the micro-gripper were optimised by the genetic algorithm(GA)method to obtain the optimum kinematic characteristics of the micro-gripper.Secondly,ANSYS Workbench software was used to do the micro-gripper’s finite element analysis.The micro-gripper’s static and dynamic properties were confirmed,and the mechanism’s amplification ratio,parasitic motion,and stress distribution were examined.In addition,the mechanism’s first four order vibration frequencies were determined.In order to reduce the displacement hysteresis characteristics of the micro-gripper and increase the precision of the microoperating system,the hysteresis phenomenon caused by the piezoelectric drive is studied,and the control system of the micro-gripper is designed using PID feedback and adaptive control.To complete the analysis of the micro-gripper system features,MATLAB simulation analysis of the system is performed to assess the effectiveness of the control system.The experimental prototype of the micro-gripper was then created using the research from the aforementioned chapters,and an experimental platform was constructed to evaluate the microgripper’s functionality.Comparison and validation are done between the outcomes of the theoretical modeling and simulation analyses in the earlier chapters.The results of the studies show that the micro-gripper performs well and is capable of high-precision grasping and releasing actions.Finally,a summary of the entire article is given,and future work is anticipated.