Study On The Rule Of Thermal Deformation Error Of The Micro-feed Table With Multi-actuators

As the auxiliary micro-feed unit of a certain kind of precision plane grinding machine,the nanometer level micro-feed table can improve the machining precision efficiently,at the same time because of the decrease of grinding depth,the problem of thermal deformation become more evident and to be primary factor on effecting positioning precision of micro-feed table.Therefore,the research on rule of thermal deformation of the micro-feed table has great importance and applied value.The dissertation aims at micro-feed table with multi-actuators,using the software I-DEAS to research the thermal deformation under different working conditions,and afford gist to compensate the thermal error of the table.The following creative work has been completed:Combining with the theory of finite control volume and thermoelasticity,the numerical model of temperature and thermal deformation has been developed.Based on the simplified micro-feed table,model of plane grinding rectangular workpiece on micro-feed table has been formulated,a kind of stimulant method of moving heat source is put forward,and the feasibility of the method is proved by comparing the simulation result and the analytic result.Using this method,simulation of plane grinding machining with I-DEAS has been realized.The temperature field of micro-feed table and workpiece under different grinding parameter have been gotten,based on which effection of grinding parameter on maximum temperature of workpiece is studied and evocable reasons are analysed.Utilizing therm-force coupling analysis , thermal deformation under corresponding temperature field are gotten,rule of effection of ambient temperature on micro-feed table and grinding parameter on workpiece's maximum deformation are analysed.And experiential formula of deformation has been formulated using regression analysis.