Synthesis Of ZnO Nano Arrays

Nanometer ZnO have extensive application prospects in the field of optoelectronic and microelectronic devices. However, the uniform particle distribution, high-density and crystalline of the present ZnO nano arrays cannot reach the requirements of ZnO nano arrays devices. To solve these problems, we prepared ZnO and GZO template on the Si (111) substrate by Magnetron Sputtering separately. Then we used the wet chemical method to synthesis nanometer ZnO arrays on top of the template. And then after, the Field Emission Scanning Electron Microscope (FESEM) was used to study the morphology of the ZnO nano arrays. The research works are as follows:1. Synthesized regular hexagonal nanometer ZnO on silicon substrate using wet chemical method, but its density is very low.2. Sputtered a layer of ZnO template on Si (111) substrate using Magnetron Sputtering method, and then synthesized ZnO nano arrays on top of the ZnO template. Optimized the ratio of Ar and O2, the annealing temperature, growth temperature, and the reaction solution ratio of template preparation and chemical synthesis conditions, synthesized high density, non-uniform particle size distribution, more consistent with C direction, the comparison rules hexagonal ZnO nano arrays.3. Sputtered a layer of GZO template on Si (111) substrate using Magnetron Sputtering method, and then synthesized ZnO nano arrays on top of the GZO template. Optimized the ratio of Ar and O2, the annealing temperature of template preparation and chemical synthesis conditions, synthesized high density, uniform particle size distribution, in the same C direction, the comparison rules hexagonal ZnO nano arrays, which is one of the best results reported in the literatures.