The Experimental Study On Key Manufacture Technology Of Precision Super Hard Abrasive Ultra-thin Grinding Wheel

The Superhard abrasive sheet wheel is a new species of grinding wheel family, with characteristic of thin thickness,big rate of diameter and thickness and high shape dimension precision,etc. It is a precision superhard abrasive grinding wheel and mainly used in cutting process and slotting process of various kinds of precious materials. Because of late for chip product research and lack of systerm research in our country,at present we can only produce part of the varieties of wafer grinding wheel, and replace imported products in the field of low and medium accuracy,and high-grade sheet wheel is still monopolized by the international leading technology companies.According to the above situation,the production of superhard abrasive sheet wheel which can replace the imported products is imperative.Superhard abrasive sheet wheel making is mainly organizationed by blank production and precision finishing machining.The blank production produced by hot pressing molding. The process including mixing, spreading, pressing molding, precision finishing machining and so on.This article starting with its manufacturing process and studying the key manufacturing technology in the system.In this paper, the concrete research content is as follows.1) superhard abrasive sheet wheel research of high performance bondBinder is a key factor of Wafer grinding wheel formula performance.It should possess excellent bonding performance, high heat resistance.and good compactibility and formability.Phenolic resin is most widely used in the resin abrasive.In this paper, the boron powder is selected to modifiy phenolic resin.Ultimately the best reaction process conditions were determined.And the performance analysis and testing of boron modified phenolic resin is made.The results show that the comprehensive performance of mixture is improved.2) superhard abrasive sheet wheel research of stall suppression technologyDue to the big diameter and thickness ratio,a very thin absolute thickness,evenlyfeeding of superhard abrasive sheet wheel is more difficult than the traditional grinding wheel.A special chip feeding technology and flatting technology is designed in this paper.Through block to control budget for feeding, Spreading material thickness,Using constant volume and horizontal pushing to make the wafer grinding wheel stand equally.The regular of pressing process parameters and it’s affect to the service life of wafer grinding wheel is analysised.Finally, the best process parameters were obtained.3) superhard abrasive sheet wheel blank research of precision finishing machining technologyThe superhard abrasive sheet wheel blank is made up of many hard abrasives and relatively soft tire body,which made the subsequent processing very difficult.This article selects the free abrasive grinding to precision processing the superhard abrasive sheet wheel blank. The broken RVD diamond is choosed as abrasive,The ductile cast iron plate is choosed as grinding disc.The regular of grinding process parameters and it’s affect to the service life of wafer grinding wheel is analysised.Finally, the best process parameters were obtained.The Sheet wheel inside and outside round processing method was discussed.After the above study on stall suppression, resins modified, precision finishing machining, to test the cutting performance of the superhard abrasive sheet wheel,Install it on the flange chuck to carry out silicon wafer cutting machining experiment.By observing the outside diameter cut loss and abrasive loss rate, the service life of wafer grinding wheel is obtained. Test results show that the manufacturing of superhard abrasive sheet wheel is feasible.