Develop Fixed-abrasive CMP Roll Of 304 Ultra-thin Stainless Steel Sheet By Roll-to-Roll

Flexible display technology is gradually improving people’s lives and communication, and significantly promote information visualization. Flexible display technology is the basis of the flexible substrate, so how to choose the flexible substrate often influences the quality of flexible device. Flexible substrates currently mainly in the following main categories: metal foil, thin glass and polymer matrix. Flexible substrate materials mainly have polymer substrate, ultra-thin glass with metal foil and graphene. Stainless steel with good corrosion resistance and total metal properties, has been widespread concern, also began to be used flexible display, but the drawback is that the surface roughness(Ra) high, using the most recognized chemical mechanical polishing techniques to this reached a global planar ization without injury purposes.Due to the traditional chemical mechanical polishing technology using free abrasive, There are a lot of disadvantages, such as the low material removal rate, abrasive uneven, high material costs and so on, people in the improvement of the traditional chemical mechanical polishing technology at the same time, technology also in development of new flat.Consolidation of chemical mechanical polishing abrasive technology is based on the traditional CMP technology developed a new type of flat technology, because it has many advantages, is expected to replace the traditional chemical mechanical polishing technology. After consulting relevant literature, there has been no abrasive chemical mechanical polishing roll of 304 stainless steel sheet consolidation of literature reports, and polishing roller is an important part in the CMP process, it is good or bad will directly affect the cost of the CMP. Therefore, this paper puts forward the ultra-thin 304 stainless steel sheet consolidation of chemical mechanical polishing abrasive roll research topic, abrasive chemical mechanical polishing for ultra-thin stainless steel sheet consolidation will provide referential basis for the theory and technology research.This article main research content is as follows:1. In this paper, based on the environment of super clean laboratory, based on the research of the polishing pad, roll the traditional polishing and polishing pads together, putforward the new research of consolidation of chemical mechanical polishing abrasive roll.2. According to the consolidation of chemical mechanical polishing abrasive roller outer component analysis, through the experiment, studies the concretion abrasive polishing pad UV light curing preparation craft and technology, through the experiment, it is concluded that the UV light curing concretion abrasive polishing pad light curing process parameters.The results showed that the light from 25 mm;The time 90 s, the curing effect is best.3. Due to the polishing roll in this experiment preparation need light curing, and laboratory original portable UV light curing machine can’t meet the requirements, so the author light curing machine for the new design. Increased the distance adjusting device, protection device, cooling device, rotary worktable, etc., make the light curing machine more intelligent, security improved, compared with the large light curing machine on the market at the same time, saving the cost and meet the requirement of experiment.The results show that the consolidation of chemical mechanical polishing abrasive material removal rate is higher than the free abrasive chemical mechanical polishing, reusable abrasive, the environmental pollution is small, flat very promising technology, the use of the consolidation of chemical mechanical polishing abrasive roll effectively improve the material removal rate and surface quality.