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Study On Key Technologies Of Micro Fluidic Chip Integrated With Micro Valveless Pump

Posted on:2005-12-22Degree:DoctorType:Dissertation
Country:ChinaCandidate:H B XieFull Text:PDF
GTID:1101360152965325Subject:Mechanical and electrical engineering
Abstract/Summary:PDF Full Text Request
In the past decade, there has been a great deal of interest in creating microfluidic systems based on MEMS techniques for use in the chemistry and biology such as biomedical detection, composing and filtering of medicine, chemical analysis and so on. By virtue of miniaturization alone, traditional chemical detection can be benefited from faster processing, lower consumption of expensive reagents and easier automatization. There is also the intriguing possibility that new solutions to research problems in chemistry and biology will be available by microfluidic techniques, which integrates all the functions of a lab including sampling, dilution, reaction, separation, detection, etc into a single microchip called Lab on Chip.This work presents an optimum design of a capillary electrophoretic analysis chip with an integrated planar micro valveless pump as a device for automatic sample exchanging and washing by using two key techniques including glass micromachining technology and Micro DPIV. The structural design of the planar micro valveless pump, the fabrication and the optimization of the prototype, the structural integration design of the microfluidic controlling devices and the fabrication process of the devices are discussed in detail, and as a result, the integrated capillary electrophoretic analysis chip is realized and optimized. This PH.D thesis is divided into seven chapters. Each chapter is introduced separately and briefly as following:The first chapter introduces the development and the present status of MEMS including the definition and the characteristics of MEMS. Firstly, as a new domain which is different from the conventional industry, the fabrication process of MEMS determines its special structural characteristics as well as its applications. Furthermore, the relationship between the fabrication and the material used in the system is strengthened in MEMS. Therefore, the fabrication process is demonstrated in detail in this chapter. At the same time, the applications of MEMS to industry, information, communication, national defence, navigation, medicine as well as biology, agriculture, environment and family facility are also presented in this section. Secondly, microfluidic systems which are interrelated with the project discussed in this thesis are introduced in details including their characteristics, applications and also the existing problems. Three main problems in MEMS design at present are pointed out including the fabrication process, detection method and integration of the system. Finally, considering both the status quo of microfluidic system research and the requirement of the integration of the capillaryelectrophoretic analysis chip, technologies of fabrication and detection of the micro fluidic system should be studied first. Then the structural design and the integration technology are discussed. The last step is the manufacture and testing of the prototype.The second chapter presents the research on the fabrication on a glass wafer in detail as a key technology of the microfluidic system. Firstly, the global status quo of the fabrication process research is expatiated on which shows two bottlenecks existed in the research on the fabrication process including the isotropic wet etching process and the glass-glass bonding process. Secondly, both theoretical analysis and systemic experiments on the two bottlenecks are developed for the optimum of both the device design and the fabrication process. Different fabrication processes for various etching depths and for different requirements of the surface quality are obtained which provides efficient tradeoffs between high etching rate and high surface quality as well as efficient glass-glass bonding process in ordinary environment which all contribute to the fabrication optimization of microfluidic systems.The third chapter depicts Micro-DPIV technology. As another key technique in microfluidic system, Micro-DPIV detection integrates multitudinous advanced technologies in various domains. It has become the most efficient meth...
Keywords/Search Tags:MEMS, Micro fluidic system, Micro valveless pump, Capillary electrophoretic analysis chip, Wet etching, Bonding, Micro-DPIV
PDF Full Text Request
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