Study Of Devices And Key Technology In Moems

In recent years, with micro-electro mechanical systems (MEMS) penetrating gradually through optics, a full new technique field-micro-opto-electro- mechanical systems (MOEMS) came into being in 1990's. Micro device is the fundamental part of MOEMS, and micro-fabrication technique is its basic technology. Here we report the fabrication of MOEMS device and study of its key techniques. These works are supported from the Natural Science Foundation of China , National 863 High Technology Project, National 973 Projects and the Science Foundation of Jilin Province .Tiny optical device used in X-ray band is one of typical devices of MOEMS. In the second chapter, during the study of compound x-ray refractive lenses, diffraction function of compound lens is derived in the light of refraction and absorption effect and the design theory of X-ray is deduced using diffraction theory in connection with the characteristic of X-ray band. The structure design of this device and micro-machined technique are also discussed.Movable device is another kind of typical MOEMS device. Movable infrared tunable micro filter, 8x8 MOEMS optical switch array and micro electromagnetic actuator used as driver of MOEMS movable device are separately explored in chapter three.Firstly, the infrared tunable micro filter is designed according to theory analysis of micro tunable grating. It was drived by electromagnetic micromotor. The fabrication method and technology exploration of integrated micro tunable infrared filter entirely adopted micro-machined technique are given through. After that, theory of MOEMS optical switch with cantalever adopted sloping bottom electrode and this switch device fabrication method of mirror chip are introduced. The fabrication technique and working principle of a type of bolt matched with this switch are given. At the same time, the coupling method of MOEMS optical switcharray is researched, and the batch-fabrication method of switch submount is put forward. Finally,the principle, structure and fabrication technique of micro top-face-sway electromagnetic actuator are researched. And a planar micromotor with two rotors was fabricated to reduce axial size and avoid unilateral pull of planar micromotor.The technology of LIGA series is one of the key-technology of MOEMS. They include LIGA technology, laser LIGA technology and UV-LIGA technology. The theory and experiment procedure are displayed in the sixth chapter. Single step mask fabrication process is developed for LIGA technology, which made mask-making process simplified. In study of the laser-LlGA technique, we introduce and fabricate an adhering mask, in order to obtain a high transmission and high accuracy mask. Furthermore, the experiment devices can be simplified by the use of this mask. During the study of UV-LIGA technology, twice spin-coat method for photoresist AZP4903 is explored. By made use of this method the height of photoresist structure can exceed lOOum...