Design And Research Of A New-style MEMS Threshold Optical Switch

MEMS Optical switch is a widely used component about optical path conversionin civilian areas because of its low-power, high response, high accuracy, low cost, andits many other advantages, it is applied to the military from civilian areas andcontinuously expand its broad application prospects.To improve the conversion range of the MEMS optical switch, the traditionaltwo-dimensional optical path converting optical switch that although the technology hasmatured, but the conversion range is only limited in a smaller flat space, because of thislack of an traditional MEMS optical switch, this article proposes an newthree-dimensional space conversion MEMS optical switch. Through the multi-physicscoupling case analysising, simplizing optical switch model and analyzing the effectsabout physical and mechanical properties of optical switches of different forms unde theinertial force field, electrostatic force field and the damping, it provide a theoreticalfoundation and reference basis to the design of MEMS optical switchesUsing CoventorWare to make system-level simulation and finite elementsimulation of the optical switch. Vertificates the rationality of the structure of theoptical switch. Through system-level simulation, it makes a clear direction to optimizethe optical switch structure design. Indicated by the finite element simulation, itobtaines various properties of different structures after optimization. All analyzesinclude voltage angular displacement analysis, sensitivity analysis, modal analysis,structural optimization analysis and Monte Carlo analysis.For the design of this MEMS optical switch, the effective space conversionalangle is5°, the rated voltage ranges from0-25V, the sensitivity is0.121°/V,500g, antimaximum interference impact acceleration is25g, this optical switch can be rotated toany space and meet the strength requirements silicon structure. The switch can bearranged in a large array of optical switches used in large and complex optical path,achieving the spatial orientation of the multi angle multi free conversion, therefoe, it hassolved the limitations of conventional switching direction.