Research On High-precision Active Vibration Control Technology For Molecular Measuring Machine

High-precision active vibration isolation technology is one of the key technologiesto guarantee high-precision measurement. This article is based on "Research Project inAdvance of National Important Scientific Instruments Developed Special Application".The active vibration isolation technology of high-precision measuring instruments isstudied, according to the theory, computer simulation and experimental research method.This article makes modeling, analysis and experiment modal analysis for activevibration isolation platform, designs the actuator of the active vibration isolation system,does experiment and makes analysis on characteristics of the actuator, and designs thegeneralized predictive fuzzy control system. Through computer simulation, the controlsystem is verified by the good vibration isolation effect.The accepted value of vibration and vibration environment of the molecularmeasuring machine are analyzed. Vibration model and dynamics equation areestablished. Passive vibration isolation and active vibration isolation to the isolationeffect of vibration interference from the foundation are analyzed systematically throughthe vibration transmissibility. Further research is about isolated effect of vibrationinterference coming from the foundation and elsewhere at the same time. Theexperimental modal analysis on the platform is done, and the dynamics equation inmodal coordinates is established.Giant magnetostrictive actuator is designed. Through the study and experiment onits features, the applicability in active vibration isolation system is validated.Active vibration isolation systems based on the generalized predictive controlalgorithm and fuzzy control theory are designed. The advantages of fuzzy control andgeneralized predictive control are analyzed, compared with passive vibration isolationsystem. On this basis, a generalized predictive controller combined with fuzzy control isdesigned. The simulation results show that the effect is significant.