Design Of Control System Of The Micro-Manufacturing Vibration Isolation Platform

In this dissertation, associating with the project "RESEARCH ON THEORY AND SUPPORTING TECHNOLOGY OF BIONICS VIBRATION ISOLATION SYSTEM FOR PRECISION EQUIPMENT", which is aided financially by the National Natural Science Foundation of China (No.50075078), the control theory and active vibration control technology of the micro-manufacturing vibration-isolation platform (MMVIP) have been studied deeply and systematically both in theoretical analysis and experimental study.In chapter 1, firstly, a survey of the importance of active vibration control technology of MMVIP is performed. Then the review and appraisement of the present research situation on and the development trend of the key technology of MMVIP, such as active vibration isolation technology and actuator, are discussed in details, and the significance of the study of active vibration control technology of MMVIP is pointed out. Finally the main content of the dissertation is introduced.hi chapter 2, the structure of MMVIP and the installment style of actuator are studied. Firstly, based on the bionics of the woodpecker's brain vibration isolation mechanism, the bionic structure of MMVIP are designed. Then the feasibility of the actuator's installment style is analyzed and validated in theory.In chapter 3, After analyzing the PID digital algorithm and fuzzy algorithm, a closed loop fuzzy-PID active vibration control system was adopted in consideration of complex and nonlinear vibration environment, it was simulated by Matlab. After the comparison and analysis with the results of simulations, some conclusions were drawn.In chapter 4, using object oriented technology, the active vibration control software is analyzed and designed. The design of the flow charts of PID control module and output data module are also discussed. The PidAVC V 1.0 is developed with Visual C-H- 6.0 in Windows 98 operation system.In chapter 5, some experiments of passive and PID active vibration control under disturbing signals based on giant magnetostrictive actuator are conducted. After the comparison and analysis with the results of experiments, some conclusions were drawn.In chapter 6, all achievements of the dissertation are summarized and the further research work, which will be done from now on, is put forward.