Study On Key Technique Of MEMS In-Plane Micro-Motion Measurement

Micro-Electro Mechanical System (MEMS) is a kind of micro-device thatcombines micro-mechanism, micro-actuator, circuit for signal process and control,interface, communication and power supply. It contains many benefits such as smallvolume, batch process and highly integrated level. It develops very soon and stepsinto industry in recent year. In the course of developing, testing technique becomesmore and more important and many MEMS research departments attach to it. MEMSdynamic testing technique is the most important in all of MEMS testing requirements.This dissertation researches on in-plane micro-motion measurement for MEMS basedon machine micro-vision. The research work includes six aspects as follows.1. The application field, current status and development trends of Micro-electromechanical system, testing technique of MEMS and in-plane dynamic testingtechnique of MEMS are fully investigated and analyzed.2. MEMS dynamic testing system, which combined blur image synthetictechnique and stroboscopic dynamic image technique, is set up to measure in-planemotion of MEMS. Software testing plane is established based on virtual instrumentLabVIEW and also integrated with MATLAB and VC to extend system function.3. MEMS motion tracing extracting algorithm combined with airspaceenhancement, wavelet space enhancement and space gray level matrix sub-pixellocation technique is brought forward. Extracting MEMS motion trace accurately isrealized through it. In the condition of continue lighting, MEMS in-plane motioncharacteristics are analyzed using the algorithm based on blur image syntheticprinciple. The in-plane dynamic parameters are obtained through sweep frequencymeasurement and sweep voltage measurement.4. MEMS two-dimension motion estimation algorithm based on block matching,phase correlation and sub-pixel location technique is brought forward. EstimatingMEMS in-plane motion quickly and accurately is realized combined time space andfrequency space measurement. Applying stroboscopic synchronous control systemthat is self-made, MEMS clear motion image sequences are acquired. MEMS motionprocess is analyzed using the algorithm. The amplitude-phase curve of MEMS inspecial driving frequency is got. The phase-frequency character is also analyzed. Andthe amplitude-frequency curve is acquired through sweep frequency measurement.5. Optical flow algorithm combination of labeling field and neighborhoodoptimization is proposed to realize precise measurement for MEMS translation androtation. The amplitude-phase curve of MEMS in special driving frequency is got.And the phase-frequency character also analyzed associated with sweep frequencymeasurement. The two motion estimation methods based on stroboscopic imagingprinciple are compared. According to testing requirement it could choose any of themin practical application.6. The mechanical properties of MEMS are analyzed according to the testingresults of dynamic characteristics. The young's modulus and residual stress ofmicro-beam are deduced by natural frequency of MEMS.