Measuring In-plane Motion Of MEMS Based On Optical Flow Technique

The demands of testing technique for Micro-Electro Mechanical System (MEMS) become more and more urgent when MEMS is gradually stepping into industrialization from the moment of research and development. Especially, MEMS dynamic testing technique has turned into an important part of MEMS testing technique because it is able to measure three-dimensional motion of MEMS and analyze vital data, such as dynamic characteristics, material characteristics and mechanical parameters. Moreover, the research on how to record motion moment of MEMS and recover MEMS in-plane motion course is the key to realize in-plane micro-motion measurement for MEMS dynamic testing technique.This dissertation researches on in-plane micro-motion measurement for MEMS based on optical flow technique. The major works in paper are following:1. Application fields, current status and development trends of MEMS, testing technique of MEMS and in-plane dynamic testing technique of MEMS were fully investigated and analyzed. And it was explained that the importance of dynamic testing technique of MEMS and the necessity of research on it;2. Optical flow technique was introduced, and the relations and differences between optical flow fields and motion fields were compared. Several kinds of typical optical flow estimation algorithms were elaborated on;3. Based on MEMS in-plane motion testing system, clear motion image sequences of different phases of MEMS device of high-speed motion were collected,which of certain driving frequency were analyzed by optical flow technique. Neighborhood optimization algorithm and optical flow constraint algorithm of believable points were proposed to analyze motion course of MEMS resonator. Furthermore, a global methods and a least-squares method based on believable points constraint were proposed, whose advantages are made full use of so that dense and robust optical flow fields are obtained and translation measure of MEMS in-plane motion was realized, and then dynamic characterization parameters of MEMS resonator were acquired;4. The experiments of simulation and application for actual MEMS device were done by proposed algorithms. The motion course of MEMS resonator was analyzed based on neighborhood optimization algorithm and optical flow constraint algorithm...