The Design Theory And Experimental Study Of Piezoelectric Micro-pumps In Series Based On Lamination

Nowadays, research on micro-pump is the pop research project in microfluidic system of MEMS. Based on the working principle of the micro-pump actuated by the piezoelectric wafer, this thesis presents a new piezoelectric (PZT) micro-pump based on the lamination, which adopts cantilever check valves. Supported by two 863 research projects, the multi-chamber micro-pump based on the lamination technology and PZT micro-pump for insulin infusion have been developed. The thesis summarizes the detailed research work including design theory, structure design, experiment tests, application research etc.1. Research, development and application of piezoelectric micro-pumpBased on the comprehensive analysis of micro-pump and micro-valve's present research condition at home and abroad, the thesis emphasizes to study the present research condition, development and applications of domestic and overseas piezoelectric micro-pump. Piezoelectric micro-pump possesses lots of merits such as simple structure, consuming lower energy, no electromagnetism interference, being suitable for micromation, which can also control output flow rate accurately according to applied electric voltage or frequency. Among many fields such as medical treatment, medicine making, biochemistry analysis, cooling electronics etc, piezoelectric pump displays extensive application prospect. So, research on the PZT pump is paid attention by all countries'researchers. At abroad, research on PZT pumps including the pump having no valves or having check valves, the pump actuated by PZT stack actuator, or the pump actuated by the PZT ultrasonic has been done for many years, and has obtained a lot of research results. In Germany and Japan, part products of PZT pump have already been sold. As for the domestic research condition, related research...