Research On The Structural Characteristics And Accuracy Control Of Manufacturing System Of Grating Produced By Mechanical Ruling

Currently, the important trend in the development of the large-scale optical system and scientific instruments is that continuously increasing the field of view and improving the resolution, so it requires that optical components must expand diameter and improve accuracy. The grating manufactured by mechanical ruling in this paper has periodic special functional structure with macroscopic scale and nanometer precision. It is the core optical element of the large optical system and scientific instruments, which need nanoscale machining accuracy and surface roughness. The special function structure finesse, the ultra-precision manufacturing system and the digital manufacturing process have achieved the top level of the related fields is the main features of this grating. However, there are lots of problems have not been solved in the basic research work, such as lacking the fundamental research of the mechanical system accuracy planning based on the grating optical performance, less research of the parts dynamics of grating ruling machine, significantly weak on the research of key moving parts of the mechanical system dynamics and lack of depth of the control strategy study of the long stroke nanometer precision positioning system. All these problems restrict the large area and high-precision grating manufacturing.Based on the blank of the research on the large area ruling grating manufacturing technology, there are four parts for the structural characteristics and accuracy control of the machine gratings manufacturing with the goal of improving the optical performance of the ruling grating in this paper:(1) The map mechanism between the optical performance of ruling grating and the mechanical properties of grating ruling engine;(2) The analysis of the structural characteristics of diffraction grating ruling machine;(3) Multi-objective optimization of the micro-displacement part based on the Drosophila optimization algorithm;(4) Signal measurement、analysis and precision motion control of the precision positioning system of mechanical ruling grating.First of all, this paper analyzes the processing and working principle of the machine gratings, and optical performance indicators which are the key factors that affect the final quality of the grating. The content analyzes the grating ruling machine system accuracy planning for gratings error characteristics. Basis on that, the paper analyzes the map mechanism between the optical performance of ruling grating and the mechanical properties of grating ruling engine to provide a reference for the research on the grating manufacturing system.In view of the positioning accuracy of the grating table directly affect the quality of the grating spectral stray light and ghost line intensity, the paper analyzes the dynamic characteristics of the grating macro/micro-drive device, including the screw-nut-driven mechanism and piezoelectric-driven system. Considerating the creeping phenomenon arisng from the table moving on the guide rail, the paper analyzes the presence or absence of the crawling phenomenon, and gives some preventive measures.The Micro-displacement of stage driving by micro-displacement structural component is the decisive factor that determines the uncertainty of the location of the groove, which will directly affect the stray light performance indicators. the paper analyzes the ability of calculate the extremum of drosophila optimization algorithm, establishs the multi-objective optimization model of the micro-displacement structural component of the grating table, embeds, and ultimately obtains the optimal solution of micro-displacement component by embedding the drosophila optimization algorithm into the multi-objective optimization model.Then, for the stray light and high-frequency part of the wavefront quality is closely related to the precision positioning signal of the grating table, and the requirement of low cycle error in the long ruled trip to reduce the stray light, the paper gives a detailed analysis of the level of accuracy of the measurement system, analyzes the non-linear characteristic by the combination of the Hilbert transform and empirical mode decomposition. The content also combines the RBF neural network and PID control as intelligent control strategy, and ultimately achieves the accuracy positioning motion control of the long stroke and overloaded grating stage to support the ruling of the high-quality grating.This research is sponsored by Chinese National Major Research Project for Equipment Development (No.ZBYZ2008-1). The research in this paper is one part of...