The Research Of Positioning Platform With A Large Diffraction Grating Ruling Machine

In recent years, with the deepening of the raster applications, its performance requirements are also getting higher and higher,"large area, high-precision "is the new standard of grating making. At present, China already has the the grating manufacturing capacity, but still do not break through in a large area, high-precision grating manufacturing, resulting in a large area of the domestic manufacturing spectrometer, high-precision grating all dependent on imports, be restricting our spectruminstrument development of the industry "bottleneck." Therefore, the developed has scored a large area, high carved high performance density diffraction grating diffraction grating ruling machine and constantly improve the design on this basis, will be a very rewarding job.This paper describes the progress of the the grating ruling engine research status, and the large stroke nanoscale positioning platform, Diffraction grating ruling machine (hereinafter referred to as "grating ruling machine") for the study, Graduation accuracy unstable for its existing, fully understand the grating ruling machine structural characteristics on the basis of careful analysisstu dies to determine the focus from the grating ruling positioning platform to proceed, research analysis and optimization of the structure of the positioning platform to improve. First, use the three-dimensional modeling software Pro/E to establish a positioning platform including the station, outside the station, rail, rod and nuts and other parts of the solid model. Use of large-scale finite element analysis software ANSYS finite clement model through the establishment of the important parts of the positioning platform within the station, outside the station, rail, rod and nut to the static analysis, obtained positioning platform and its various components of stress cloud map and displacement contours in-depth analysis of the various components of deformation maps. Finally, the use of the principle of optimal design of key components-rod structure optimization and analysis, and has once again proven to optimize results.From various parts of the static analysis of the results:positioning the platform as a whole less stress concentration, the strength to meet the work requirements; Indoor stage, and deformation of the outer table is small, the slight deformation of the precise positioning of the positioning platform was less affected, the stiffness basically meet the requirements, the main consideration in the design should reduce weight; Deformation of the rod and nut rod directly affect the overall accuracy; Parametric model of the rod, in order to improve the stiffness of the objective function is to ensure the same of the total mass of the rod, the rod size parameters to optimize the design, making the stiffness of the rod increases, the material has been more fully utilized,the accuracy of the product increases, have greater significance in practical applications.