Research On The Key Technologies Of High Performance MEMS Inertia Sensors Engineering

The development of MEMS inertial technology promotes the developing of the inertial sensors based on rotating and non-rotating from the macroscopic concept to the microscopic world.In recent years,especially the organic combination of micro-nano processing technology and vibration inertial technology,making the inertial instrument technology has undergone major changes,thus greatly expanding the inertial technology in the military and civilian applications.In order to meet the requirements of engineering application,the key technologies including design,fabrication process,circuit,test and application method of two typical MEMS inertial devices,MEMS gyroscope and MEMS accelerometer are studied.The main research contents and results are as follows.The structure mechanism and scheme are researched of the dual-mass linear vibration MEMS gyroscope and the MEMS sandwich accelerometer.Solved the problem of frequency drift and the nonlinearity caused by the large angular rate input of MEMS gyroscope,a mechanical and thermal stress isolation structure is proposed to improve the mechanical properties and temperature characteristics of MEMS structures.The research of high precision bulk silicon MEMS dry etching process and wet etching process technology has been carried out,and the standard MEMS fabrication process has been formed to realize the online control of the key parameters such as the resonant frequency of MEMS gyroscopestructure,which improves the machining precision and yield.Key technologies including three layers of MEMS structure bonding,cavity structure cutting,high Q vacuum packaging and low stress bonding has been developed.also research the online bonding quality detection technology.The system level simulation of MEMS inertial system has studied to speeds up the MEMS inertial instrument design verification process.The gyroscope detection axis has been closed-looped,modal matching and other closed-loop work to improve the accuracy have also realized.The static force negative stiffness of MEMS accelerometer is studied,and the closed-loop control of non-minimum phase system is realized.The research on temperature error modeling and compensation of MEMS inertial instrument is carried out.The study of environmental adaptability of MEMS inertial instruments especially the anti-shock adaptability was carried out.The influence of various mechanical environments on MEMS inertial instruments was defined by the composite mechanical environment test.Carried out MEMS inertial device space environment adaptability research work.The MEMS inertial instrument sensitive structure and the complete instrumentare tested,the automated test work has been studied to improve the test efficiency.Successfully developed a variety of MEMS inertia instrument engineering prototype and application products,carried out MEMS inertial device application research work.Large scale MEMS gyroscopes are used in high speed rolling missiles.With the solving of the problems including cross coupling,mechanical environment adaptability and waveform distortion,the MEMS Yaw rate sensor is successfully used in the stable loop of rolling missile.MEMS accelerometer is applied to the YuTu lunar rover,is the milestone of the China-made MEMS initial devices in the deep space exploration application.The MEMS gyroscope and MEMS accelerometer products is also applicated in the XY-2 satellite vibration test platform.