Design And Simulation Of Silicon MEMS Gyroscope

As an important application of MEMS technology,MEMS gyroscope has advantages of small volume,high reliability and low cost etc. Since the development of first MEMS gyroscope,MEMS gyroscope shows high growth potential in the defense industry and civil industry. It has been applied in aeronautical-space and auto-electronic engineering extensively. Many countries have seen it as one of priority technologies must be focused.Through the structural simulation and optimal design of the sensitive device,the design and characteristics of Z-axis silicon MEMS gyroscope which can work at atmospheric pressure was described in this thesis. The main contents of the research are as follows:Aimed at applying in high-g environment and adoption of MEMS Bulk-Silicon processing technology,not only the overall structure design of the sensitive device based on an analysis of the bending beams and fingers but also the design pattern of Electrostatic drive and capacitive sensing was achieved in this thesis. A sensitive device of gyro with structure of decoupling with large-mass and high-sensitivity was proposed.Secondly,based on the ANSYS finite element simulation analysis technology,the high-g resistance,modal,air damping,and structural stability were analyzed. The primary design of Gyro has some high-g resistance ability and capacitive sensing. However,it has not been satisfied with the performance indicators and targets.Finally,according to the simulation results and key performance criterion,not only considering the constraints of targets and designs but also incorporating with the characteristic of Bulk-Silicon processing technology,the finally model and geometrical parameters of Gyro have been got. Through theoretical analysis,simulation and reliability compliance test,the optimized large-mass gyroscope which should suffice to apply in ammunition with high anti-overload ability,strong structure reliability,strong decoupling,high sensitivity and strong capacitive sensing,provides an important parameters and solid foundation for further development of the gyroscope.