MEMS electrothermal actuators in guided and unguided Fourier transform spectroscopy systems

Fourier Transform Spectroscopy is a method of determining material composition and concentration in both laboratory and field environments. Miniaturization of this technology enables a spectrometer to function onsite and permits rapid environmental analysis. Microelectromechanical systems provide a means for a spectrometer to move from the macro to micro-scale.;Two micromirrors are designed, fabricated, and characterized. The first micromirror is based on electrothermal actuation and presented to facilitate a microspectrometer. The design is a ladder actuator that provides strong piston displacement characteristics with ultra-low tilt. The device performance yields strongly linear motion and a large fill factor. The second micromirror is also based on electrothermal actuation and is designed to increase reliability of the device and facilitate a microspectrometer. The design is a mesh actuator with large fill factor that yields large vertical displacement.;A microspectrometer is designed and implemented with fabricated ladder actuator and mesh actuator micromirrors in a benchtop prototype configuration. The system is constructed for all main design considerations as follows: optical system; 15 micromirror; mirror drive and data acquisition; and data processing. The full system is demonstrated by acquiring an unknown interferogram and calibration interferogram with different data sets and different spectral resolutions with both designed micromirrors. Additionally, the system is used in micromirror characterization to determine piston resonance of different micromirrors.;Finally, actuated waveguides are designed, fabricated and characterized. These devices are designed towards use in guided wave spectroscopy and fiber scanning applications. The designs are a proof of concept and demonstrate large vertical displacement of the non-actuating waveguide in concert with the displacement of the actuators.;Overall, micromirrors have been designed, fabricated, and characterized. The ladder actuator micromirror and mesh actuator micromirror has been demonstrated in a designed and constructed spectroscopy system with successful spectrum generation from unknown interferograms. The spectroscopy system has also been utilized for mirror characterization to determine piston resonance. Finally, actuated waveguides have been designed, fabricated, and characterized.