| In an effort to futher increase throughput and performance, high speed, positive tone i-line and DUV photoresists were evaluated and compared by depth of focus (DoF), resist profile, linearity, and contrast. Based on the data presented in this report, Resist A should have a higher resolution and a wider process latitude than Resist B. Throughput increased by 88% when a high speed photoresist and the Canon FPA3000 iW Wide Field stepper were used. In order to produce integrated circuits with sub-0.25 {dollar}mu{dollar}m features, chemically amplified photoresists were compared and evaluated. The resists were capable of producing 0.25 {dollar}mu{dollar}m WS and isolated lines, as well as, 0.30 {dollar}mu{dollar}m contact holes. Continued process optimization will improve resist performance for specific applications.; Practicum two. The fundamental practicum report on "TmDOTP{dollar}sp{lcub}5-{rcub}{dollar} as an Extracellular Space Marker and NMR Shift Reagent for Quantitative Determination of Tissue Intracellular Sodium" determined the relative extracellular space (rECS) was the same for both TmDOTP{dollar}sp{lcub}5-{rcub}{dollar} and CoEDTA{dollar}sp{lcub}-{rcub}{dollar} in the in vivo heart and liver, showing that both agents experience the same ECS. TmDOTP{dollar}sp{lcub}5-{rcub}{dollar}, as an in vivo {dollar}sp{lcub}23{rcub}{dollar}Na NMR shift reagent, was used to quantify {dollar}rmlbrack Nasp{lcub}+{rcub}rbracksb{lcub}i{rcub}{dollar} in in vivo livers both by NMR and AAS. The results compared favorably with previous results obtained from AAS techniques.; Practicum one. The investigation "The Chemistry of Cr(VI) in a Constructed Wetland" determined the effectiveness of a laboratory scale wetland in removing toxic Cr(VI) from a 100 ppm Cr(VI) waste stream for one year. The results of batch studies suggested the primary removal method was through complexation of chromium with the carboxylate groups in organic matter. |
