| Nanocrystalline titania (Ti02) thin films were prepared by radio-frequency (R. F.) magnetron sputtering. The main factors affecting the deposition rate, uniformity and refractive index of Ti02 thin films, such as the distances between target and substrate, the sputtering gas pressures etc., were studied. The influence of target material, wafer kinds and annealing temperature on the crystal structure of the thin films were studied by X-ray diffraction(XRD). The optical constants were determined by ultraviolet-visible spectrophotometey and Raman spectroscopy. The microstructure of the films was observed by Atomic force microscopy (AFM). And their superficial morphology and structure were also studied. Besides, The photocatalytic performance and hydrophil icity of Ti02 thin films were studied by photographic method.It is shown that the nanocrystalline Ti02 thin films remains anatase crystallites in a wide range temperature (400~900C), and have good photocatalytic performance and hydrophilicity.
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