Inversion And Measurement Of Optical Parameter Of DLC Film

This paper focus on the parameter inversion and the measurement method of optical constant of Diamond-like Carbon (DLC)——a new film material.Means of film preparation and optical constant measurement are introduced at length.Both methods of ellipsometic spectra and transmission spectra to inversion are summarized mostly and the instrument and measurement result given.Because the result measured by the two methods is optic quantity,from which does not directly received the optical constant(refractive index and extinction coefficient)and thickness.To solve it ,optimization algorithm is applied generally.A new optimization algorithm based swarm aptitude——Particle Swarm Optimization algorithm is adopted and three optical constant of film gained.Then,Optical constant of sample is calculated with the relation of K-K,and the result identical with that of inversion approximately.Angular-Resolved Scattering ang Total Integrated Scattering is derived by using the perturbation method of vector scattering theories.Character parameter of rough surfaces is calculated by using TIS.Bidirectional Reflectance Distribution Function (BRDF) of various samples are measured and five parameter model of BRDF found by applying genetic simulated annealing optimization algorithm and particle swarm optimization algorithm differently.The optimization result shows that the precision and efficency of particle swarm optimization are better than that of genetic simulated annealing optimization.It is a good means that the range of parameter is gained by genetic simulated annealing optimization algorithm firstly,then improved the precision by partical swarm optimization algorithm.