Preparation And Characterization Of BaTiO₃-Based Thin Films

BaTiO3-based thin film as a special material has penetrated into many parts of the science field land it has already been a basic tech for the microelectronics communication, sensor, optics. Along with the development of the Technology, various demands are put forward for the tech and quality of the thin film. They demand the size from u m to nm, of the structure they demand special direction or heteroepitaxial .There are also strict demands on morphology. In order to satisfy the desire we should do more research and get the achievement on development, research, and examine accordingly.Recently, the preparation of BaTiOa-based thin film are reported .There are physical methods such as radio-frequency magnetron sputtering, pulsed laser deposition, MBE and chemical methods such as Sol-Gel, metallorganic chemical vapor deposition (MOCVD), hydrothermal and so on .Generally, the physical methods need vacuum environment, they are so strict to the apparatus that current laboratory can hardly achieve it. Compared with physical tech the chemical tech is easier. They do not need large equipments. For example, the Sol-Gel processing are better homogeneity. The whole course is to make metal organic or inorganic matter hydrolyze and purse up to sol and then use thermal treatment make it oxide or compound. As it has advantage in accurate, low sinter temperature, stoichiometry control, this processing has become widely used. Much literatures has reported to prepare BaTiO3-based on the Sol-Gel method.The main content in this paper includes: (1) The synthesization of stable sol To synthesize transparent and stable sol for BST thin film is a very importantstep. Based on many literatures we did some research on different solutions, water, HAC, chelating matter dosage respectively and the impact of different sol concentration on the sol stabilization and the morphology. We get the optimum condition here.(2) The preparation and properties of BST thin filmsAccording to the optimum condition which we have chosen to synthesize the BST thin film and the DTA-TGA, IR, XRD, SEM as functions of thermal treatment and anneal- temperature. By using AFM we can get some information about the growing grains: calcine- anneal is a process of thin film crystallization .That is nucleatio, growing, cleavage, swallow, regeneration. Here the anneal- temperature we chose is of some guidance significance.(3)The preparation of BST thin filmsIn this part, the XRD and AFM methods are used to discuss the Sr-doped impact to the crystallization temperature The growing trend of the grain-size, the lattice parameter with the increased strontium concentration are also discussed in theory.