The Structural Design And Analysis On A New Type Of High Rotary Accuracy Microspindle

In this dissertation, the high rotary accuracy bearings used in spindle system of super precision machines in existence are mentioned; also the disadvantages of these bearings used for the microfabrication are analyzed, based on the analysis of the theory of flexture hinge, a new microspindle system used for the microfabrication is designed which included the work theory and whole structure of the microspindle, then the project tried to apply Finite Element Method(FEM) to the analysis and design of the structure of the microspindle.The bearing of the microspindle uses whole structural flexture hinge to ensure the spindle's high rotary accuracy. First the whole structure of the microspindle system was analyzed and designed, then With the FEM software ANSYS, the finite element model of bearing was built according to its structural character and work conditions, and then static analysis was applied to it. Static analysis determined the stresses and displacements in the bearing under all sort of typical work conditions. The result of the static analysis revealed that the stress of the bearing was lower to the material's allowable stress, also the X, Y, Z total travel of the centre point was very small, up to the requirements of the design.As an important quality index, the dynamic specialty determines the security and efficiency. In the project, the vibration characteristic (natural frequencies and mode shapes) of the structure was determined by applying modal analysis. It also can be a starting point for another, more detailed, dynamic analysis, such as a transient dynamic analysis, a harmonic response analysis, or a spectrum analysis.This project provided valuable exploration and consultant for the future design of the micromachine used for the electrochemical microfabrication by the whole system design and analysis of the microspindle.