Characteristics Of ZnO Films Prepared By Ultrasonic Spray Pyrolysis Method

In this paper, the various techniques, applications, and up-to-date progresses in the research of ZnO thin films are reviewed. We paid special attention to its potential application in energy saving coating glasses, a brief introduction including the film development, energy saving characteristic, types and preparation methods.ZnO thin films were grown on the heated glass substrate by the ultrasonic spray pyrolysis method, zinc acetate solutions mixed with ethanol were used as the precursor material. The X-ray Diffraction (XRD), the Scanning Electron Microscopy (SEM) and the UV-Vis Spectrometer were employed to analyze the crystalline and microstructure of the thin films. The effects of growth parameters on the quality of ZnO thin films, such as precursor solutions concentration, substrate temperature and deposition time are discussed. The results show that the substrate temperature and solution concentration play a critical role in the film deposition. Samples that prepared from 0.3M precursor solutions have the dense smooth and homogenous structure and exhibit the preferential orientation of (002) to the substrate surface when deposited in the temperature around 450℃. The optical tests of these thin films shows that the dense smooth and homogenous microstructure also have a positive effect on the film visible light transmittance performances, the films grown in the above situation could reach the visible light transmittance as high as over 80%.