| As the rapid development of the precision technology, the miniaturization and high surface quality have become the evident feature of modern mechanical production. At now, some countries in the world such as Germany, America and Japan which have handle the technology of ultra-precision machining have succeed in generating micro structure surface with the feature of sine-wave and saw-wave in material such as Aluminum, Electroless nickel and OFHC copper.All those work have provided an economic and efficiency way in producing micro-photonics components like Fresnel lens by injection molding.The applications of using diamond tool to generate micro structure have been analyzed to find the demanding for machine tool, cutting tool, workpiece material and environment control by contrast. The criterion and evaluative parameters for determine the surface quality have also been found.By considering the linear and nonlinear factors in cutting process such as operating parameters, tool geometry parameters, spindle motion errors, material properties, an integrated model has been constructed by MATLAB and gets the dynamic cutting forces in three-dimensions. Machining system response model has been constructed by calculating the mass, damping and stiffness of the tool system and workpiece system by the transfer function module. The dynamic increments in three-dimensions between the cutting tool and workpiece have been simulated by putting the cutting forces to the machining system response model.By considering the tool nose radius, feed rate and the tool path, an ideal surface can be formed by MATLAB program. Then the real surface can be simulated by adding the dynamic increments to the ideal surface. By contrasting the simulated surface roughness under different parameters, the main factors that affect the surface quality of the micro optical elements have been found, and the operating parameters that fulfill the application requirements of micro optical elements have also been found in theory.
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