| The high quality ZnO thin film is one of most potential membranous materials at present. And the different preparation method has tremendous influence on the microstructure and the performance of ZnO-based thin films. So the exploration of new method which made low cost and high quality sample seems to be very important now.This article has used three methods, successfully prepared the ZnO thin film on the silicon wafer and the glass substrate, which has the diluted magnetism characteristic transition metal (Fe, Co) dopes. The initial preparation craft is take the glycol methyl as the solvent, the zinc acetate as the forerunner body, the ethanolamine as a stabilizer, evenly obtained, the transparent polytrophic ZnO thin film. Through selects the different annealing methods, the analysis obtains the superior annealing craft parameter。 Through selects the different annealing method, we obtained the superior annealing craft parameter. Then we prepares the diluted magnetism characteristic Zn1-xFexO thin films, which has the doping content x as 1%, 2%, 3%.In order to further find out better preparation method, we used PVA method which can dissolve high polymer, to prepare the sol. We got a set of unique method, and successfully prepared the doped Zn1-xCoxO thin film, the doping content is 8%, 12%, 18%. Using XRD, AFM and PL spectroscope, finally demonstrated that the thin film is hexagonal wurtzite structure, has highly z axes orientation; which has even and compact surface and good fluorescent characteristic. Meanwhile after analysis one kind of doping component sample, we find that the film also may have the diluted magnetism characteristic.The main feature is that we use the brand-new PVA method to realize the sol to gel, and success doping.At the same time we discovered that, with the sample doping content change the XRD peaks appear regularly migration, moreover in the Co doping samples, the PL peaks along with the doping content change, appeared regularly red shift phenomenon.
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