Schematic Design Of Macro-Micro Rotary Table And Development Of Micro Driving Circuit

High-precision positioning technology is one of the key ultra-precision machining technologies. Nowadays, PZT actuators become a key executive part of modern high-precision positioning system because of its outstanding performance. Thus, technologies of piezoactuator driver and high-precision micro displacements monitoring system are becoming one of the important technologies of the high precision positioning system.More and more researchers give much attention to the study of positioning accuracy of rotary table through analysis of rotary table tendency at home and abroad. Electrostriction can implement nano-level positioning and has been used widely in translational table. This dissertation gave a solution to improving positioning accuracy of rotary table by using a piezoelectric ceramic drive. It also designed the overall structure of the rotary table, including computing electromotor power and torque, selecting appropriate electromotor, encoder and bearing, positioning controlling of servo system and so on. To improve rotary table accuracy by using a piezoelectric ceramic drive is a qualitative leap, It give us a new method and new direction. to improve rotary table accuracy。In application, flexure hinge is the inter-segment of electrostriction device to transfer displacement. To design appropriate flexure hinge is the guarantee of accomplishing accuracy. While finishing designing and computation on the flexure hinge mechanical structures, this dissertation verified the performance of the flexure hinge through FEA method. At the same time this dissertation selected the appropriate type of the piezoelectric ceramic.Piezoactuator driver power is a key part of micro-feeding equipment. This dissertation designed and realized the hardware of piezoactuator driver power by balancing high-precision and load capacity. Considering the different application background of rotary working-table, this dissertation designed and realized high-accuracy switch mode piezoactuator driven power and DC amplification piezoactuator driven power. At last this dissertation checked standardized witch mode piezoactuator driven power and DC amplification piezoactuator driven power.