| Rigid-harding crystal materials have very extensive and special use in many field, such as infrared optics, reflected optics, electronics industry, astronautics industries, military industry. Fast development of science and technology puts forward stricter request to rigid-harding crystal materials. It has high strength, high rigid-brittle characteristics etc, and easily causes breakage and micro-cracks during the period of mechanical process. The craft of process is bad and needs higher cost. Along with modern advanced technical development, the ultra-precision process of the rigid-harding material with eminent performance is paid more attention to currently.The paper , based on analyzing and studying domestic and international rigid-harding crystal materials cutting techniques, studied thoroughly ultra-precision precise cutting theories of rigid-harding crystal materials. Various craft parameters was optimized in the process, and the super precise process surface quality is improved. PV's value of Nd:YAG crystal material's polishing surface can attain 0.088λ and Ra is O.38nm. That is to say that we attain the expected goals. The research result of this paper will also have important instruction meaning for the rigid-harding crystal materials ' ultra-precision polishing.
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