| Micro-EDM (Electric Discharge Machining) and Two-photon micro-fabrication is becoming more and more popular and focused, and the Ultra-Precision Positioning Stage is one of the key technologies in micro/nanofabrication including micro-EDM. It comprises advanced technologies in several research areas and has broad applications. This thesis discusses the construction,the performance analysis,the error identification and the error compensation of the Ultra-Precision Positioning Stage.The composing and principle of micro-electron discharge machining (micro-EDM) system are investigated in this paper firstly. It shows that the characteristics of the Ultra-Precision Positioning Stage have key effects on machining precision. The principle and character of Ultra-Precision Positioning Stage at home or abroad are concluded and analyzed.Based on the movement requirements of the micro-EDM system, a Three-Dimensional Ultra-Precision Positioning Stage is composed by support base, resonant piezoelectricity motor, linear bearings and linear encoder. The capabilities such as the least step distance, the lowest speed and the highest speed are investigated and the result respectively meets the motion need of micro-EDM.The system of vibration isolation is constructed and the vibration isolation capacity has been analyzed. Modal analysis of vibration for the isolation system has been completed by experiment and software.Error model of the stage has been constructed and methods for error identification and error compensation have been given. |
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