Research On A Radial Error Separation Method About Gyre Movement

Nanometric error compensation technique is proposed with the development of nanotechnogy, which inherits the advantages of the traditional error compensation technique. This technique has important values of research and application for higher accuracy measurement. Error separation technique is an essential part of error compensation technique, due to harmonic suppression, the separation precision is very limited.In this paper, theoretical error analysis of several error separation methods is performed, based on the advantages and disadvantages of these methods, a multi-series multi-step method is proposed. This method synthesizes several multi-step methods, analyzes the corresponding harmonic one by one and eliminates the items that bring harmonic suppression. Multi-series multi-step method enlarges the range without harmonic suppression by synthesis of harmonic to separate the main shaft circumgyration error.The following works was finished in this thesis:1. Analyzes the principle of multi-step error separation technique and the harmonic suppression problem. The emulation result for 10 steps indexing method indicates that error of separation is 0.305 and 0.346;2. Analyzes the principle of multi-series multi-step method. Make simulation of multi-series multi-step method based on 3, 4, 5 multi-step method, which indicates that multi-series multi-step method could resolve harmonic suppression problem in a certain range with a higher precision. When the sample number is 512, the error of separation is about 0.041 and 0.046;3. Analyzes the effect of sample number to the precision of error separation. The precision can be improved by increasing the sample number. When the sample number is 1024, the error of separation is up to 0.027 and 0.031;4. Analyzes the separation precision in different filtering range, which indicates that large filtering range results in low precision;5. Experiment certification on multi-series multi-step error separation is performed. Experiment data indicates that this technique has very high separation precision. The separation precision is up to 4.2nm. Both the theoretical analysis and the experiment strongly suggest that multi-series multi-step error separation technique has good maneuverability and high separation precision.