| Solar spectra selective absorption thin film(SSSATF),having advantages such as environmental protection,high efficiency of light-heat conversion,is a extremely important and crucial material in the application of solar energy.At present,solar is investigated in many countries,to obtain high and stable performance SSSATF with simple and low cost technology.In this paper,the research and development of SSSATF,combine with solar collectors and solar water-heater are detaily introduced.In this paper,we choosed the Ti as the target,Ar as working gas,O2 and N2 as reactive gases,using DC reactive magnetron sputtering method to prepare TiNx thin films on Si substrates,and Ti-TiNx-TiO2-x multi-layer thin films on Cu substrates.1.TiNx thin films are prepared on Si substrates.Under the condition of the argon gas flow is 30sccm,nitrogen flow is 2.0sccm,substrate temperature is 300℃,and the sputtering current is 0.35A,the as-deposited TiNx thin films are cubic phase, polycrystalline with(200) preferred orientation.And a low reflectance is presented nearby wavelength 455nm in all the TiNx thin films prepared under various process parameters,while high reflectance is presented in the near-infrared band.2.Single-layer TiO2-x thin film is deposited on glass substrates.Transmittance, refractive index and extinction coefficient of TiO2-x thin film were significantly affected by the oxygen flow,within wavelength range 400-1000nm,transmittance increase gradually with increasing O2 flow,however,refractive index and extinction coefficient decrease with increasing O2 flow.3.Ti-TiNx-TiO2-x multi-layer thin films were deposited on Cu substrates.The average absorptance within the band of wavelength 300-2500nm isα=82%.These multilayer thin films can be used for solar spectra selective absorption thin films.
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