The Finite Element Structural Analysis And Optimum Design Of Single Crystal Furnace

Crystal furnace used CZ method is the key equipment to extract single crystal silicon, the quality and stability of furnace is important when the eqiupement is working. We should not only know the crystal growth process but also master the machinery, electronics, computers, vacuum thermal dynamics professional knowledge when design the furnace.The tesis mainly analyze the mechanical performance of device structure and do a part of optimal design about the structure. They are necessary on ensure the equipment performance.Set TDR-120 type single crystal furnace as the research object, use Pro/E software to establish 3-D entities model. Analyse work process and working conditions of single crystal furnace. Solid45 entity element was selected to mesh the simplified device structure. Finite element method was used to determine the sizing block force trends in different work positions. Taken this as a known condition, the anti-force size of sizing blocks was calculated. Comparison the device different working position, we got the trend of the anti-force in each sizing block. And then checking bolt strength used in important joints. Analysis provided basis for furnace assembly and on-site installation.Orthogonal test was used to simulate furnace support block structure. FEM support block was established on ANSYS software. Test analyse main factors which determine weight of support block structure. According to the FEM calculating data, the support block structure was validated. Through analyzing the data, max displacement and stress were obtained. Then established regression equation by the least squares method. With light weight as the goal, optimal objective function and constraints were set. Then reasonable lighten design project was achieved by the optimized mathematical model.Stability and vibration problems were exzisted when furnace extract single crystal, thesis research furnace overall vibration characteristics by theory and experiment. Through modal analysis the first ten natural frequencies and mode shapes were obtained, factors that influence system vibration and structure weakness were obtained. Through vibration test of overall furnace structure, experimental valu of natural frequency was got. Experiment values verify the correctness of theory analysis. Different parts of system were field test when furnace was working. Different parts of system vibaration singnals were got. Through comparative analysis, affect of system vibration by hydraulic pumps and vacuum pumps were excluded.Conclude vibration which was produced at work main by machining quality, precision installation. Rotation caused by eccentric is also a keypoint. This provides reference for further vibration analysis of single crystal furnace. This provides baisis for improving quality of furnace.